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Benchmark

- Test Reticles for lithography system

- http://www.benchmarktech.com

- 7 Kimball Lane, Building E Lynnfield, MA 01940 USA

- contact@benchmarktech.com / (781) 246 - 3303

Test reticles for lithography system

- Phase shift Focus Monitor

- Visual Diagnositic Reticle

- Universal Matching Reticle

- Resolution Test Masks

- Custom Test Reticles

Photonic Science

- Scientific Detector Systems

SensArray in Situ Process Monitoring
- In-situ temperature measurement & In-situ plasma properties measurment
- http://www.kla-tencor.com/chip-insituprocess.html
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